Invention Grant
US09249493B2 Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus by using the same
有权
有机层沉积装置及使用该有机发光显示装置的有机发光显示装置的制造方法
- Patent Title: Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus by using the same
- Patent Title (中): 有机层沉积装置及使用该有机发光显示装置的有机发光显示装置的制造方法
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Application No.: US13470077Application Date: 2012-05-11
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Publication No.: US09249493B2Publication Date: 2016-02-02
- Inventor: Myong-Hwan Choi , Mu-Hyun Kim , Sung-Bong Lee , Myung-Ki Lee
- Applicant: Myong-Hwan Choi , Mu-Hyun Kim , Sung-Bong Lee , Myung-Ki Lee
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Christie, Parker & Hale, LLP
- Priority: KR10-2011-0049794 20110525
- Main IPC: C23C14/04
- IPC: C23C14/04 ; C23C14/12 ; C23C14/24 ; C23C14/50 ; C23C14/56

Abstract:
An organic layer deposition apparatus including: a deposition source configured to discharge a deposition material; a deposition source nozzle unit arranged at a side of the deposition source and including a plurality of deposition source nozzles; a patterning slit sheet facing the deposition source nozzle unit and including a plurality of patterning slits, the patterning slit sheet being smaller than the substrate in at least one of a first direction or a second direction perpendicular to the first direction; a blocking member configured to be disposed between the substrate and the deposition source to block at least a portion of the substrate; and a heating member on the blocking member and configured to heat the blocking member, and the substrate is spaced apart from the organic layer deposition apparatus by a predetermined distance, and the substrate or the organic layer deposition apparatus is movable relative to the other.
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