Invention Grant
- Patent Title: PVD RF DC open/closed loop selectable magnetron
- Patent Title (中): PVD RF直流开/闭环选择磁控管
-
Application No.: US13761267Application Date: 2013-02-07
-
Publication No.: US09249500B2Publication Date: 2016-02-02
- Inventor: Keith A. Miller
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/35 ; H01J37/32 ; H01J37/34

Abstract:
Methods and apparatus for a magnetron assembly are provided herein. In some embodiments, a magnetron assembly includes a first plate having a first central axis, the first plate rotatable about the first central axis, a first open loop magnetic pole coupled to the first plate, a second plate having a second central axis, the second plate rotatable about the second central axis, and a second open loop magnetic pole coupled to the second plate, wherein the first open loop magnetic pole and the second open loop magnetic pole form a closed loop magnetic pole when the first and second open loop magnetic poles are aligned.
Public/Granted literature
- US20140216923A1 PVD RF DC OPEN/CLOSED LOOP SELECTABLE MAGNETRON Public/Granted day:2014-08-07
Information query
IPC分类: