Invention Grant
- Patent Title: Surface correction on coated mirrors
- Patent Title (中): 涂层镜面的表面校正
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Application No.: US13475173Application Date: 2012-05-18
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Publication No.: US09249501B2Publication Date: 2016-02-02
- Inventor: Dirk Heinrich Ehm , Franz-Josef Stickel , Juergen Mueller
- Applicant: Dirk Heinrich Ehm , Franz-Josef Stickel , Juergen Mueller
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Edell, Shapiro & Finnan LLC
- Main IPC: G03B27/52
- IPC: G03B27/52 ; C23C14/48 ; G03B7/20 ; G02B26/08 ; G03F7/20 ; G21K1/06 ; G02B17/06

Abstract:
A mirror (1) for a microlithography projection exposure apparatus including a substrate (3) and a reflective coating (5). A functional coating (11) between the substrate (3) and the reflective coating (5) has a local form variation (19) for correcting the surface form of the mirror (1), wherein the local form variation (19) is brought about by a local variation in the chemical composition of the functional coating (11) and wherein a thickness of the reflective coating (5) is not changed by the local variation in the chemical composition of the functional coating (11). The local variation in the chemical composition of the functional coating (11) can be brought about by bombardment with particles (15), for example with hydrogen ions.
Public/Granted literature
- US20120300184A1 SURFACE CORRECTION ON COATED MIRRORS Public/Granted day:2012-11-29
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