Invention Grant
- Patent Title: Method of passivating ultra-thin AZO with nano-layer alumina
- Patent Title (中): 用纳米层氧化铝钝化超薄AZO的方法
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Application No.: US14037862Application Date: 2013-09-26
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Publication No.: US09249504B2Publication Date: 2016-02-02
- Inventor: Mitchell Stewart Burberry , Lee William Tutt
- Applicant: Mitchell Stewart Burberry , Lee William Tutt
- Applicant Address: US NY Rochester
- Assignee: EASTMAN KODAK COMPANY
- Current Assignee: EASTMAN KODAK COMPANY
- Current Assignee Address: US NY Rochester
- Agent Raymond L. Owens
- Main IPC: C23C16/40
- IPC: C23C16/40 ; C23C16/06 ; C23C16/44
Abstract:
A method of making an electrical conductor includes depositing an ultra-thin layer including aluminum-doped zinc oxide layer on a surface and using atomic layer deposition to deposit a nano-layer including alumina in contact and conformal with a surface of the ultra-thin layer including aluminum-doped zinc oxide.
Public/Granted literature
- US20150086709A1 PASSIVATING ULTRA-THIN AZO WITH NANO-LAYER ALUMINA Public/Granted day:2015-03-26
Information query
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