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US09249523B2 Electro-polishing and porosification 有权
电抛光和开孔

Electro-polishing and porosification
Abstract:
Forming a porous layer on a silicon substrate is disclosed. Forming the porous layer can include placing a silicon substrate in a first solution and conducting a first current through the silicon substrate. It can further include conducting a second current through the silicon substrate resulting in a porous layer on the silicon substrate.
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