Invention Grant
- Patent Title: Displacement detection apparatus
- Patent Title (中): 位移检测装置
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Application No.: US14036573Application Date: 2013-09-25
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Publication No.: US09250057B2Publication Date: 2016-02-02
- Inventor: Masaaki Kusumi , Daisuke Uchiyama
- Applicant: MORI SEIKI CO., LTD.
- Applicant Address: JP Yamato-Koriyama
- Assignee: MORI SEIKI CO., LTD.
- Current Assignee: MORI SEIKI CO., LTD.
- Current Assignee Address: JP Yamato-Koriyama
- Agency: Oliff PLC
- Priority: JP2012-226601 20121012
- Main IPC: G01B7/14
- IPC: G01B7/14 ; G01D5/38 ; G11B3/00 ; G01D5/245

Abstract:
A displacement detection apparatus includes a scale unit and a detection head unit. The scale unit has a reference track unit and sub-track units, the pitch directions of these units being different from one another. The detection head unit has three or more detection units configured to read scales of the reference track unit and the sub-track units and to output signals in accordance with the read scales. The three detection units detect displacement in two orthogonal directions on a plane parallel to a plane along which the detection head unit moves.
Public/Granted literature
- US20140103914A1 DISPLACEMENT DETECTION APPARATUS Public/Granted day:2014-04-17
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