Invention Grant
US09250062B2 Devices for determining layer thickness and/or contamination level of a belt
有权
用于确定带的层厚度和/或污染水平的装置
- Patent Title: Devices for determining layer thickness and/or contamination level of a belt
- Patent Title (中): 用于确定带的层厚度和/或污染水平的装置
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Application No.: US14196757Application Date: 2014-03-04
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Publication No.: US09250062B2Publication Date: 2016-02-02
- Inventor: Bernd Doerband , Ralf Lindner
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102011082793 20110915
- Main IPC: G01B11/28
- IPC: G01B11/28 ; G01B11/06 ; G01N21/94 ; G01N21/89

Abstract:
The invention relates to an apparatus for determining a layer thickness on a tape moved along a feed direction, comprising: a movement unit for moving the tape along the feed direction, a light generating unit for generating illumination radiation, a beam shaping unit disposed downstream of the light generating unit for shaping at least one strip-shaped illumination beam for linear illumination of the tape transversely with respect to the feed direction, a detector unit for detecting illumination radiation reflected and/or transmitted at the tape, and an evaluation device for determining the layer thickness on the basis of the detected illumination radiation. The apparatus can also be used for determining a degree of contamination of a surface of the tape, the surface being contaminated by particles, by detecting illumination radiation scattered at the tape.
Public/Granted literature
- US20140185060A1 DEVICES FOR DETERMINING LAYER THICKNESS AND/OR CONTAMINATION LEVEL OF A BELT Public/Granted day:2014-07-03
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