Invention Grant
- Patent Title: Coaxial probe
- Patent Title (中): 同轴探头
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Application No.: US14342024Application Date: 2012-08-29
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Publication No.: US09250264B2Publication Date: 2016-02-02
- Inventor: Chae-Yoon Lee
- Applicant: Chae-Yoon Lee
- Applicant Address: KR Busan
- Assignee: LEENO INDUSTRIAL INC.
- Current Assignee: LEENO INDUSTRIAL INC.
- Current Assignee Address: KR Busan
- Agency: Kile Park Reed & Houtteman PLLC
- Priority: KR10-2011-0086950 20110830; KR10-2011-0088291 20110901; KR10-2012-0091138 20120821
- International Application: PCT/KR2012/006884 WO 20120829
- International Announcement: WO2013/032218 WO 20130307
- Main IPC: G01R1/067
- IPC: G01R1/067

Abstract:
Disclosed is a coaxial probe comprising, an internal conductor comprising an upper contact configured to contact a semiconductor device; a lower contact configured to contact a tester for testing the semiconductor device; and an internal elastic member configured to elastically bias at least one of the upper and lower contacts to make the upper and lower contacts distant from each other; an external conductor configured to surround the internal conductor; a plurality of gap members which is respectively inserted into opposite ends between the internal conductor and the external conductor to create a predetermined air gap between the internal conductor and the external conductor; and at least one external elastic member that is inserted into an external circumferential surface of the external conductor to elastically bias at least one of the semiconductor device and the tester to a direction that makes either the semiconductor device or the test distant from the external conductor.
Public/Granted literature
- US20140203831A1 COAXIAL PROBE Public/Granted day:2014-07-24
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