Invention Grant
- Patent Title: Optical arrangement in a microlithographic projection exposure apparatus
- Patent Title (中): 微光刻投影曝光装置中的光学布置
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Application No.: US13467760Application Date: 2012-05-09
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Publication No.: US09250417B2Publication Date: 2016-02-02
- Inventor: Dirk Schaffer , Stefan Hembacher , Jens Kugler
- Applicant: Dirk Schaffer , Stefan Hembacher , Jens Kugler
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102011076549 20110526
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G02B7/182 ; G03F7/20

Abstract:
The disclosure relates to optical arrangements in a microlithographic projection exposure apparatus. In accordance with one aspect, an optical arrangement has at least one mirror segment arrangement including a plurality of separate mirror segments. The mirror segments are connected to a carrying structure of the projection exposure apparatus via mounting elements. At least one of the mounting elements, which is assigned to a first one of the mirror segments, extends, on the opposite side to the optically active surface of the mirror segment arrangement, at least partly into the region of a second mirror segment of the mirror segment arrangement. The second mirror segment is adjacent to the first mirror segment.
Public/Granted literature
- US20120300183A1 OPTICAL ARRANGEMENT IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS Public/Granted day:2012-11-29
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