Invention Grant
US09250418B2 Fabry-perot interferometer with piezoelectric actuator contracting in radial direction on membrane
有权
具有压电致动器的法布里 - 珀罗干涉仪在膜上沿径向收缩
- Patent Title: Fabry-perot interferometer with piezoelectric actuator contracting in radial direction on membrane
- Patent Title (中): 具有压电致动器的法布里 - 珀罗干涉仪在膜上沿径向收缩
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Application No.: US13394209Application Date: 2010-09-16
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Publication No.: US09250418B2Publication Date: 2016-02-02
- Inventor: Thor Bakke , Ib-Rune Johansen , Andreas Vogl , Frode Tyholdt , Dag Thorstein Wang
- Applicant: Thor Bakke , Ib-Rune Johansen , Andreas Vogl , Frode Tyholdt , Dag Thorstein Wang
- Applicant Address: NO Trondheim
- Assignee: SINTEF
- Current Assignee: SINTEF
- Current Assignee Address: NO Trondheim
- Agency: Winstead PC
- Priority: NO20093022 20090918
- International Application: PCT/EP2010/063628 WO 20100916
- International Announcement: WO2011/033028 WO 20110324
- Main IPC: G02B7/18
- IPC: G02B7/18 ; G02B7/182 ; G02B26/00 ; G02B26/08 ; H01L41/09 ; H01L41/18 ; H01L41/187
Abstract:
The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as mirror (1), the element being mechanically coupled to a frame (4) with a bendable coupling (2A), wherein actuator elements (3A, 3B) are mounted on said coupling between the frame and element, the coupling and actuator elements being adapted to provide a movement to the element when subject to signal from a signal generator.
Public/Granted literature
- US20120162664A1 ACTUATOR FOR MOVING A MICRO MECHANICAL ELEMENT Public/Granted day:2012-06-28
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