Invention Grant
- Patent Title: Polymer, positive resist composition and patterning process
- Patent Title (中): 聚合物,正性抗蚀剂组合物和图案化工艺
-
Application No.: US13919558Application Date: 2013-06-17
-
Publication No.: US09250517B2Publication Date: 2016-02-02
- Inventor: Masayoshi Sagehashi , Jun Hatakeyama , Koji Hasegawa
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2012-142572 20120626
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/004 ; G03F7/20

Abstract:
A polymer comprising recurring units of butyrolactone (meth)acrylate, recurring units having a carboxyl or phenolic group which is substituted with an acid labile group, and recurring units having a phenol group or an adhesive group in the form of 2,2,2-trifluoro-1-hydroxyethyl is quite effective as a base resin for resist. A positive resist composition comprising the polymer is improved in such properties as a contrast of alkali dissolution rate before and after exposure, acid diffusion suppressing effect, resolution, and profile and edge roughness of a pattern after exposure.
Public/Granted literature
- US20130344442A1 POLYMER, POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS Public/Granted day:2013-12-26
Information query
IPC分类: