Invention Grant
US09250531B2 Method of forming resist pattern and negative tone-development resist composition
有权
形成抗蚀剂图案和负色调显影抗蚀剂组合物的方法
- Patent Title: Method of forming resist pattern and negative tone-development resist composition
- Patent Title (中): 形成抗蚀剂图案和负色调显影抗蚀剂组合物的方法
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Application No.: US14003708Application Date: 2012-03-07
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Publication No.: US09250531B2Publication Date: 2016-02-02
- Inventor: Tomoyuki Hirano , Daichi Takaki , Daiju Shiono , Kenri Konno , Isamu Takagi
- Applicant: Tomoyuki Hirano , Daichi Takaki , Daiju Shiono , Kenri Konno , Isamu Takagi
- Applicant Address: JP Kawasaki-Shi
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2011-050817 20110308
- International Application: PCT/JP2012/055776 WO 20120307
- International Announcement: WO2012/121278 WO 20120913
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/38 ; C08F220/24 ; C08F224/00 ; C08F226/02 ; C08F228/06 ; G03F7/32 ; C08F220/28 ; C08F220/38 ; G03F7/039 ; G03F7/20

Abstract:
A method of forming a resist pattern including: forming a resist film on a substrate using a resist composition containing a base component (A) which exhibits decreased solubility in an organic solvent by action of an acid; exposing the resist film; and patterning by a negative-tone development using a developing solution containing the organic solvent, wherein the base component (A) contains a resin component (A1) having a structural unit (a0) which generates acid upon exposure and a structural unit (a1) derived from an acrylate ester which may have the hydrogen atom bonded to the carbon atom on the α-position substituted with a substituent and contains an acid decomposable group which exhibits increased polarity by the action of acid, and the developing solution contains a nitrile solvent.
Public/Granted literature
- US20140004467A1 METHOD OF FORMING RESIST PATTERN AND NEGATIVE TONE-DEVELOPMENT RESIST COMPOSITION Public/Granted day:2014-01-02
Information query
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