Invention Grant
US09250533B2 Method of fabricating multi-level metallic parts by the liga-UV technique
有权
通过紫外线技术制造多层金属部件的方法
- Patent Title: Method of fabricating multi-level metallic parts by the liga-UV technique
- Patent Title (中): 通过紫外线技术制造多层金属部件的方法
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Application No.: US13060203Application Date: 2009-07-23
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Publication No.: US09250533B2Publication Date: 2016-02-02
- Inventor: Jean-Charles Fiaccabrino , Gilles Rey-Mermet
- Applicant: Jean-Charles Fiaccabrino , Gilles Rey-Mermet
- Applicant Address: CH Le Locle
- Assignee: Nivarox-FAR S.A.
- Current Assignee: Nivarox-FAR S.A.
- Current Assignee Address: CH Le Locle
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: EP08162693 20080820
- International Application: PCT/EP2009/059476 WO 20090723
- International Announcement: WO2010/020515 WO 20100225
- Main IPC: H05K3/02
- IPC: H05K3/02 ; H05K3/10 ; G03F7/40 ; C23C2/02 ; C23C2/26 ; C25D5/02 ; C25D5/10 ; G03F7/00 ; C25D1/00 ; C25D5/56

Abstract:
The method of fabricating a multi-level, metallic microstructure includes the steps consisting in structuring a first layer of photosensitive resin so as to obtain a first level of a resin mould, the aperture in the first resin layer revealing a conductive surface of a substrate, structuring a second photosensitive resin layer over the first level of a resin mould so as to obtain a multi-level resin mould, the apertures in the multi-level mould revealing the conductive surface of the substrate, galvanically depositing a metal or alloy in the apertures of the multi-level resin mould and separating a multi-level metallic structure formed by the metal or alloy deposited in the apertures from the substrate and the multi-level resin mould.
Public/Granted literature
- US20110146070A1 METHOD OF FABRICATING MULTI-LEVEL METALLIC PARTS BY THE LIGA-UV TECHNIQUE Public/Granted day:2011-06-23
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