Invention Grant
US09250533B2 Method of fabricating multi-level metallic parts by the liga-UV technique 有权
通过紫外线技术制造多层金属部件的方法

Method of fabricating multi-level metallic parts by the liga-UV technique
Abstract:
The method of fabricating a multi-level, metallic microstructure includes the steps consisting in structuring a first layer of photosensitive resin so as to obtain a first level of a resin mould, the aperture in the first resin layer revealing a conductive surface of a substrate, structuring a second photosensitive resin layer over the first level of a resin mould so as to obtain a multi-level resin mould, the apertures in the multi-level mould revealing the conductive surface of the substrate, galvanically depositing a metal or alloy in the apertures of the multi-level resin mould and separating a multi-level metallic structure formed by the metal or alloy deposited in the apertures from the substrate and the multi-level resin mould.
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