Invention Grant
- Patent Title: Techniques for fabricating Janus sensors
- Patent Title (中): 制造Janus传感器的技术
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Application No.: US13875394Application Date: 2013-05-02
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Publication No.: US09251978B2Publication Date: 2016-02-02
- Inventor: Qing Cao , Kangguo Cheng , Zhengwen Li , Fei Liu , Zhen Zhang
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts, Mlotkowski, Safran & Cole PC
- Agent Catherine Ivers; Andrew M. Calderon
- Main IPC: G01N27/404
- IPC: G01N27/404 ; H01H29/02 ; G01N33/00 ; G01N15/10 ; G01N27/327 ; G01N27/447

Abstract:
Electromechanical sensors that employ Janus micro/nano-components and techniques for the fabrication thereof are provided. In one aspect, a method of fabricating an electromechanical sensor includes the following steps. A back gate is formed on a substrate. A gate dielectric is deposited over the back gate. An intermediate layer is formed on the back gate having a micro-fluidic channel formed therein. Top electrodes are formed above the micro-fluidic channel. One or more Janus components are placed in the micro-fluidic channel, wherein each of the Janus components has a first portion having an electrically conductive material and a second portion having an electrically insulating material. The micro-fluidic channel is filled with a fluid. The electrically insulating material has a negative surface charge at a pH of the fluid and an isoelectric point at a pH less than the pH of the fluid.
Public/Granted literature
- US20140326613A1 Techniques for Fabricating Janus Sensors Public/Granted day:2014-11-06
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