Invention Grant
- Patent Title: Drive device and conveyance device
- Patent Title (中): 驱动装置和输送装置
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Application No.: US13519232Application Date: 2010-12-22
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Publication No.: US09252038B2Publication Date: 2016-02-02
- Inventor: Hirotoshi Nakao , Muneyoshi Nishitsuji , Takahiro Yoshino , Takuya Kuriyama , Taiji Chiba , Daisuke Kawakubo , Kiyotaka Yamada
- Applicant: Hirotoshi Nakao , Muneyoshi Nishitsuji , Takahiro Yoshino , Takuya Kuriyama , Taiji Chiba , Daisuke Kawakubo , Kiyotaka Yamada
- Applicant Address: JP Kanagawa
- Assignee: Ulvac, Inc.
- Current Assignee: Ulvac, Inc.
- Current Assignee Address: JP Kanagawa
- Agency: Saliwanchik, Lloyd & Eisenschenk
- Priority: JP2009-297918 20091228
- International Application: PCT/JP2010/007446 WO 20101222
- International Announcement: WO2011/080897 WO 20110707
- Main IPC: B25J9/04
- IPC: B25J9/04 ; H01L21/677 ; B25J9/10 ; B25J9/00

Abstract:
To provide a drive device rigid enough to endure a stress due to a reaction during driving of an arm unit, and to provide a conveyance device including the same.A drive device includes a frame and an actuator installed in the frame. The frame is formed by integral molding by casting. The frame includes a connecting portion connectable to a division wall of a conveyance chamber, a bottom plate portion serving as an opposed portion provided to be opposed to the connecting portion, and a plurality of coupling portions that couple the connecting portion and the bottom plate portion to each other. The actuator includes three coaxial shafts (two rotating shafts and single turning shaft), three motors, and a transmission mechanism that transmits a rotational driving force by the three motors to the three shafts. The frame is formed by the integral molding, and hence it is possible to realize a drive device having a high rigidity.
Public/Granted literature
- US20120293026A1 DRIVE DEVICE AND CONVEYANCE DEVICE Public/Granted day:2012-11-22
Information query
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