Invention Grant
US09252189B2 Nonvolatile semiconductor memory element, nonvolatile semiconductor memory device, and method for manufacturing nonvolatile semiconductor memory device
有权
非易失性半导体存储元件,非易失性半导体存储器件以及用于制造非易失性半导体存储器件的方法
- Patent Title: Nonvolatile semiconductor memory element, nonvolatile semiconductor memory device, and method for manufacturing nonvolatile semiconductor memory device
- Patent Title (中): 非易失性半导体存储元件,非易失性半导体存储器件以及用于制造非易失性半导体存储器件的方法
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Application No.: US13996203Application Date: 2012-06-18
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Publication No.: US09252189B2Publication Date: 2016-02-02
- Inventor: Satoru Fujii , Kiyotaka Tsuji , Takumi Mikawa
- Applicant: Satoru Fujii , Kiyotaka Tsuji , Takumi Mikawa
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2011-142372 20110627
- International Application: PCT/JP2012/003958 WO 20120618
- International Announcement: WO2013/001742 WO 20130103
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00 ; H01L29/66 ; H01L29/872 ; H01L27/22

Abstract:
A nonvolatile semiconductor memory element includes: a variable resistance element including a first electrode, a variable resistance layer, and a second electrode, and having a resistance value which changes according to a polarity of an electric pulse applied between the first electrode and the second electrode; and a current steering element which is electrically connected to the variable resistance element, allows a current to flow bidirectionally, and has a nonlinear current-voltage characteristic. The current steering element (i) has a structure in which a first current steering element electrode, a first current steering layer, and a second current steering element electrode are stacked in this order, and (ii) includes a second current steering layer which covers side surfaces of the first current steering element electrode, the first current steering layer, and the second current steering element electrode.
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