Invention Grant
- Patent Title: Unit for liquid phase epitaxial growth of monocrystalline silicon carbide, and method for liquid phase epitaxial growth of monocrystalline silicon carbide
- Patent Title (中): 单晶碳化硅液相外延生长单元,单晶碳化硅液相外延生长方法
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Application No.: US13995715Application Date: 2011-06-29
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Publication No.: US09252206B2Publication Date: 2016-02-02
- Inventor: Satoshi Torimi , Satoru Nogami , Tsuyoshi Matsumoto
- Applicant: Satoshi Torimi , Satoru Nogami , Tsuyoshi Matsumoto
- Applicant Address: JP Osaka-shi, Osaka
- Assignee: TOYO TANSO CO., LTD.
- Current Assignee: TOYO TANSO CO., LTD.
- Current Assignee Address: JP Osaka-shi, Osaka
- Agency: Keating & Bennett, LLP
- Priority: JP2010-288469 20101224; JP2010-288472 20101224; JP2010-288475 20101224; JP2010-288479 20101224
- International Application: PCT/JP2011/064875 WO 20110629
- International Announcement: WO2012/086237 WO 20120628
- Main IPC: H01L29/04
- IPC: H01L29/04 ; C30B19/00 ; C30B19/12 ; C30B29/36 ; H01L21/02 ; H01L29/16

Abstract:
The cost of liquid phase epitaxial growth of a monocrystalline silicon carbide is reduced. A feed material 11 is such that when a surface layer thereof containing a polycrystalline silicon carbide with a 3C crystal polymorph is subjected to X-ray diffraction, a diffraction peak corresponding to a (111) crystal plane and a diffraction peak other than the diffraction peak corresponding to the (111) crystal plane are observed as diffraction peaks corresponding to the polycrystalline silicon carbide with a 3C crystal polymorph. A seed material 12 is such that when a surface layer thereof containing a polycrystalline silicon carbide with a 3C crystal polymorph is subjected to X-ray diffraction, a first-order diffraction peak corresponding to a (111) crystal plane is observed as a diffraction peak corresponding to the polycrystalline silicon carbide with a 3C crystal polymorph but no other first-order diffraction peak having a diffraction intensity of 10% or more of the diffraction intensity of the first-order diffraction peak corresponding to the (111) crystal plane is observed.
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