Invention Grant
- Patent Title: Photodiode device with reducible space charge region
- Patent Title (中): 具有可减少空间电荷区域的光电二极管装置
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Application No.: US14430534Application Date: 2013-09-10
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Publication No.: US09252298B2Publication Date: 2016-02-02
- Inventor: Jordi Teva
- Applicant: ams AG
- Applicant Address: AT Unterpremstaetten
- Assignee: ams AG
- Current Assignee: ams AG
- Current Assignee Address: AT Unterpremstaetten
- Agency: McDermott Will & Emery LLP
- Priority: EP12186405 20120927
- International Application: PCT/EP2013/068741 WO 20130910
- International Announcement: WO2014/048730 WO 20140403
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L31/0224 ; H01L31/103 ; H01L31/0352

Abstract:
The photodiode device comprises a doped region (2) contiguous with a contact region (3) of the same conductivity type located at the substrate surface (1′), an appertaining anode or cathode connection (7, 11), a further contact region (5) of an opposite conductivity type at the substrate surface, and a further anode or cathode connection (8, 12). The contact region (3) is arranged at least on opposite sides of an active area of the substrate surface that covers the further contact region (5). A lateral pn junction (16) and an associated space charge region is formed at the substrate surface by a boundary of one of the contact regions, the boundary facing the other contact region. A field electrode (6) is arranged above the lateral pn junction, separated from the lateral pn junction by a dielectric material (10), and is provided with a further electrical connection (9, 13) separate from the anode and cathode connections. By the field electrode (6), the space charge region at the surface (1′) is reduced and the peripheral dark current of the photodiode decreases considerably.
Public/Granted literature
- US20150287847A1 PHOTODIODE DEVICE WITH REDUCIBLE SPACE CHARGE REGION Public/Granted day:2015-10-08
Information query
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