Invention Grant
US09252567B2 Surface-emitting laser element, atomic oscillator, and surface-emitting laser element testing method 有权
表面发射激光元件,原子振荡器和表面发射激光元件测试方法

Surface-emitting laser element, atomic oscillator, and surface-emitting laser element testing method
Abstract:
A disclosed surface-emitting laser element includes a lower DBR formed on a substrate, an active layer formed on the lower DBR, an upper DBR formed on the active layer, a wavelength-adjusting layer formed above the active layer, and a plurality of surface-emitting lasers configured to emit respective laser beams having different wavelengths by changing a thickness of the wavelength-adjusting layer. In the surface-emitting laser element, the wavelength-adjusting layer includes one of a first film having alternately layered GaInP and GaAsP and a second film having alternately layered GaInP and GaAs, the thickness of the wavelength-adjusting layer being changed by partially removing each of the alternating layers of a corresponding one of the first and second films.
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