Invention Grant
- Patent Title: Method of forming diamond conditioners for CMP process
- Patent Title (中): 形成CMP工艺用金刚石调理剂的方法
-
Application No.: US13455448Application Date: 2012-04-25
-
Publication No.: US09254548B2Publication Date: 2016-02-09
- Inventor: Yen-Chang Chao , Kei-Wei Chen , Ying-Lang Wang
- Applicant: Yen-Chang Chao , Kei-Wei Chen , Ying-Lang Wang
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: B24B53/017
- IPC: B24B53/017 ; B24D3/06 ; B24D3/28 ; B24D18/00

Abstract:
A method for making a conditioner disk used in a chemical mechanical polishing (CMP) process comprises applying a first layer of at least one binder over a substrate; disposing a plurality of diamond particles on the first layer of the at least one first binder at the plurality of locations; and fixing the plurality of diamond particles to the substrate by heating the substrate to a raised temperature and then cooling the substrate. The plurality of diamond particles disposed over the substrate are configured to provide a working diamond ratio higher than 50% when the conditioner disk is used in a CMP process.
Public/Granted literature
- US20130288582A1 METHOD OF FORMING DIAMOND CONDITIONERS FOR CMP PROCESS Public/Granted day:2013-10-31
Information query