Invention Grant
US09254608B2 Imprint apparatus, imprint method, and method of manufacturing article 有权
印刷装置,印记法和制造方法

Imprint apparatus, imprint method, and method of manufacturing article
Abstract:
The present invention provides an imprint apparatus which performs an imprint process in which a resin on a substrate is cured, in a contact state in which a mold is kept in contact with the resin, to transfer a pattern onto the substrate, the apparatus including a stage configured to move upon holding the substrate, a detection unit configured to detect a first mark formed on the mold, and a second mark formed on the substrate, and a processing unit configured to perform alignment of the mold and the substrate in the contact state.
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