Invention Grant
- Patent Title: Imprint apparatus, imprint method, and method of manufacturing article
- Patent Title (中): 印刷装置,印记法和制造方法
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Application No.: US13875435Application Date: 2013-05-02
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Publication No.: US09254608B2Publication Date: 2016-02-09
- Inventor: Naoki Maruyama
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2012-116914 20120522
- Main IPC: B29C59/02
- IPC: B29C59/02 ; G03F7/00

Abstract:
The present invention provides an imprint apparatus which performs an imprint process in which a resin on a substrate is cured, in a contact state in which a mold is kept in contact with the resin, to transfer a pattern onto the substrate, the apparatus including a stage configured to move upon holding the substrate, a detection unit configured to detect a first mark formed on the mold, and a second mark formed on the substrate, and a processing unit configured to perform alignment of the mold and the substrate in the contact state.
Public/Granted literature
- US20130313744A1 IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2013-11-28
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