Invention Grant
- Patent Title: Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and methods of manufacturing liquid ejecting head, liquid ejecting apparatus, and piezoelectric element
- Patent Title (中): 液体喷射头，液体喷射装置，压电元件，液体喷射头，液体喷射装置和压电元件的制造方法
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Application No.: US13849909Application Date: 2013-03-25
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Publication No.: US09254651B2Publication Date: 2016-02-09
- Inventor: Koji Ohashi , Yasuhiro Itayama , Kenichi Kurokawa , Eiji Osawa , Motohisa Noguchi
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2012-072572 20120327; JP2012-072574 20120327
- Main IPC: B41J2/045
- IPC: B41J2/045 ; B41J2/14 ; B41J2/16 ; H01L41/08 ; H01L41/09 ; H01L41/319 ; H01L41/18 ; H01L41/22 ; H01L41/27
Abstract:
Provided is a liquid ejecting head including a piezoelectric element which includes a piezoelectric layer and electrodes provided on the piezoelectric layer on an upper portion of a zirconium oxide layer, in which the zirconium oxide layer is formed of granular crystal grains.
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