Invention Grant
US09254992B2 Method of making a MEMS gyroscope having a magnetic source and a magnetic sensing mechanism 有权
制造具有磁源和磁感测机构的MEMS陀螺仪的方法

  • Patent Title: Method of making a MEMS gyroscope having a magnetic source and a magnetic sensing mechanism
  • Patent Title (中): 制造具有磁源和磁感测机构的MEMS陀螺仪的方法
  • Application No.: US13863269
    Application Date: 2013-04-15
  • Publication No.: US09254992B2
    Publication Date: 2016-02-09
  • Inventor: Tao Ju
  • Applicant: Tao Ju
  • Applicant Address: CN Beijing
  • Assignee: Tao Ju
  • Current Assignee: Tao Ju
  • Current Assignee Address: CN Beijing
  • Agency: Treasure IP Group, LLC
  • Main IPC: B81C3/00
  • IPC: B81C3/00 B81B3/00 G01C19/56 H01L29/82 G01P15/105
Method of making a MEMS gyroscope having a magnetic source and a magnetic sensing mechanism
Abstract:
A MEMS gyro is provided, having a movable portion, a non-movable portion, and a magnetic sensing structure that comprises a magnetic source disposed at the movable portion, a magnetic sensing element positioned at the non-movable portion. The movable portion is capable of moving in response to external angular velocity or an external accelerator such that the magnetic field sensed by the magnetic sensing element is in relation to the movement of the movable portion, therefore, the angular velocity or the accelerator. A method of making the MEMS gyro device is disclosed herein.
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