Invention Grant
US09255325B2 Method and apparatus for igniting silicon rods outside a CVD-reactor
有权
用于点燃CVD反应器外的硅棒的方法和装置
- Patent Title: Method and apparatus for igniting silicon rods outside a CVD-reactor
- Patent Title (中): 用于点燃CVD反应器外的硅棒的方法和装置
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Application No.: US13807334Application Date: 2011-07-25
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Publication No.: US09255325B2Publication Date: 2016-02-09
- Inventor: Wilfried Vollmar
- Applicant: Wilfried Vollmar
- Applicant Address: DE
- Assignee: Centrotherm Sitec GmbH
- Current Assignee: Centrotherm Sitec GmbH
- Current Assignee Address: DE
- Agency: Tarolli, Sundheim, Covell & Tummino, LLP
- Priority: DE102010032103 20100723
- International Application: PCT/EP2011/003724 WO 20110725
- International Announcement: WO2012/010329 WO 20120126
- Main IPC: C23C16/24
- IPC: C23C16/24 ; C01B33/035

Abstract:
A method and a device for igniting silicon rods outside a CVD-reactor. A silicon rod is disposed inside a chamber of a casing of an ignition device. At least one pair of contact electrodes applies a first voltage supplied by a transformer with an open circuit voltage sufficiently high to initialize a current flow in and ignite the silicon rod. Optionally, the silicon rod may be heated by a current flow and/or an external heating unit to a temperature within a predetermined range. The silicon rod is removed from the ignition device and may be exposed to a depositing process inside a CVD-reactor. The ignition of the silicon rod outside the CVD-reactor facilitates a new ignition for the depositing process.
Public/Granted literature
- US20130209684A1 METHOD AND APPARATUS FOR IGNITING SILICON RODS OUTSIDE A CVD-REACTOR Public/Granted day:2013-08-15
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