Invention Grant
- Patent Title: Vertical-type heat treatment apparatus
- Patent Title (中): 立式热处理装置
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Application No.: US13226120Application Date: 2011-09-06
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Publication No.: US09255736B2Publication Date: 2016-02-09
- Inventor: Koji Yoshii , Tatsuya Yamaguchi , Wenling Wang , Takanori Saito
- Applicant: Koji Yoshii , Tatsuya Yamaguchi , Wenling Wang , Takanori Saito
- Applicant Address: JP Minato-Ku
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Minato-Ku
- Agency: Burr & Brown, PLLC
- Priority: JP2010-201821 20100909
- Main IPC: F27B17/02
- IPC: F27B17/02 ; F27B17/00 ; H01L21/67

Abstract:
A heat treatment apparatus and control method enabling the apparatus to settle down an internal temperature of a treating vessel to a target temperature accurately and quickly. The heat treatment apparatus includes a furnace body with a heater on an inner circumferential surface thereof, the treating vessel disposed inside the furnace body, a cooling medium supply blower and cooling medium release blower each connected to the furnace body, and a temperature sensor provided inside the treating vessel. A signal from the temperature sensor is sent to a heater output computing unit and blower output computing unit included in a controller. The heater output computing unit determines a heater output level based on a heater output numerical model and the signal from the temperature sensor. The blower output computing unit determines a blower output level based on a blower output numerical model and the signal from the temperature sensor.
Public/Granted literature
- US20120064472A1 VERTICAL-TYPE HEAT TREATMENT APPARATUS Public/Granted day:2012-03-15
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