Invention Grant
- Patent Title: Method of measuring refractive index distribution, method of manufacturing optical element, and measurement apparatus of refractive index distribution
- Patent Title (中): 测量折射率分布的方法,光学元件的制造方法和折射率分布的测量装置
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Application No.: US13923580Application Date: 2013-06-21
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Publication No.: US09255879B2Publication Date: 2016-02-09
- Inventor: Tomohiro Sugimoto
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2012-154073 20120709
- Main IPC: G01N21/21
- IPC: G01N21/21 ; G01N21/41 ; G01N21/45 ; B29D11/00 ; G01M11/02

Abstract:
A method of measuring a refractive index distribution includes steps of setting a plurality of different arrangements by a translation movement in a state where an object is arranged in first and second media having refractive indices different from a refractive index of the object, measuring transmissive wavefront of the object for each of media and each of the plurality of arrangements by reference light entering the object (S400), obtaining wavefront aberration corresponding to a difference between each transmissive wavefront and a reference transmissive wavefront (S500), obtaining refractive index distribution of the object by removing an influence of a shape error of the object using wavefront aberration of two media in which the object is arranged at the same position (S70), and obtaining refractive index distribution information of the object based on a plurality of refractive index distributions corresponding to the plurality of arrangements (S80).
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