Invention Grant
- Patent Title: Sensor and method for manufacturing sensor
- Patent Title (中): 传感器和传感器制造方法
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Application No.: US14159538Application Date: 2014-01-21
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Publication No.: US09255940B2Publication Date: 2016-02-09
- Inventor: Satoshi Nakajima
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2013-009017 20130122
- Main IPC: H05K1/11
- IPC: H05K1/11 ; H05K1/14 ; G01P1/02 ; G01L19/00 ; G01P15/125 ; B81C1/00 ; H01L23/31 ; H01L23/00 ; H01L25/16

Abstract:
A sensor includes: a substrate on which an active chip including a semiconductor circuit is disposed; and a passive chip including an acceleration sensor, and a thick portion and a thin portion, the thick portion being disposed on the substrate so as to be in contact therewith. An active chip terminal is disposed on the active chip. A passive chip terminal is disposed on the passive chip at the thin portion. The passive chip terminal and the active chip terminal face each other and are connected via a bump.
Public/Granted literature
- US20140204552A1 SENSOR AND METHOD FOR MANUFACTURING SENSOR Public/Granted day:2014-07-24
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