Invention Grant
- Patent Title: Fabrication of a micro-optics device with curved surface defects
- Patent Title (中): 具有弯曲表面缺陷的微光学器件的制造
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Application No.: US13792504Application Date: 2013-03-11
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Publication No.: US09256014B2Publication Date: 2016-02-09
- Inventor: Fei Ding , Urs T. Duerig , Armin W. Knoll , Rainer F. Mahrt , Thilo H. Stoeferle
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Priority: GB1205552.1 20120329
- Main IPC: G02B5/28
- IPC: G02B5/28 ; H01S5/183

Abstract:
A method of fabrication of a micro-optics device included providing a layer of material; patterning the layer of material by one or more of: locally unzipping and desorbing molecules thereof, with a nano-scale dimensioned probe, to obtain a curved surface for the layer of material, the curved surface having a curved profile in a plane section; and completing a layer structure perpendicular to the plane section by providing one or more additional layers of material in contact with the curved surface to obtain the micro-optics device, wherein the micro-optics device has the layer structure, with a given layer thereof comprising a defect delimited by two surfaces, wherein one of the two surfaces is the curved surface.
Public/Granted literature
- US20130258478A1 FABRICATION OF A MICRO-OPTICS DEVICE WITH CURVED SURFACE DEFECTS Public/Granted day:2013-10-03
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