Invention Grant
- Patent Title: Methanofullerenes
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Application No.: US14068254Application Date: 2013-10-31
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Publication No.: US09256126B2Publication Date: 2016-02-09
- Inventor: Alex Philip Graham Robinson , Jon Andrew Preece , Richard Edward Palmer , Andreas Frommhold , Dongxu Yang , Alexandra McClelland , Drew Athens , Xiang Xu
- Applicant: Alex Philip Graham Robinson , Jon Andrew Preece , Richard Edward Palmer , Andreas Frommhold , Dongxu Yang , Alexandra McClelland , Drew Athens , Xiang Xu
- Applicant Address: GB Swansea, Wales
- Assignee: IRRESISTIBLE MATERIALS LTD
- Current Assignee: IRRESISTIBLE MATERIALS LTD
- Current Assignee Address: GB Swansea, Wales
- Agency: The Patent Practice of Szmanda & Shelnut LLC
- Main IPC: G03F7/038
- IPC: G03F7/038 ; G03F7/027 ; C07C69/96 ; G03F7/20 ; G03F7/38 ; H01L51/00 ; C07C69/753

Abstract:
The present disclosure relates to novel methanofullerene derivatives, negative-type photoresist compositions prepared therefrom and methods of using them. The derivatives, their photoresist compositions and the methods are ideal for fine pattern processing using, for example, ultraviolet radiation, beyond extreme ultraviolet radiation, extreme ultraviolet radiation, X-rays and charged particle rays.
Public/Granted literature
- US20140134843A1 Methanofullerenes Public/Granted day:2014-05-15
Information query
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