Invention Grant
- Patent Title: Layered radiation-sensitive materials with varying sensitivity
- Patent Title (中): 具有不同灵敏度的分层辐射敏感材料
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Application No.: US14532031Application Date: 2014-11-04
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Publication No.: US09256132B2Publication Date: 2016-02-09
- Inventor: Jeffrey A. Rock , Gerald W. Fly , Yeh-Hung Lai , Keith E. Newman , Alan J. Jacobsen , William B. Carter , Peter D. Brewer
- Applicant: GM Global Technology Operations LLC
- Applicant Address: US MI Detroit
- Assignee: GM Global Technology Operations LLC
- Current Assignee: GM Global Technology Operations LLC
- Current Assignee Address: US MI Detroit
- Agency: Fraser Clemens Martin & Miller LLC
- Agent James D. Miller
- Main IPC: G03F7/40
- IPC: G03F7/40 ; G03F7/20 ; G03F7/095

Abstract:
A method for fabricating a radiation-cured structure is provided. The method includes the steps of providing a first radiation-sensitive material and applying a second radiation-sensitive material to the first radiation-sensitive material. The first radiation-sensitive material has a first sensitivity. The second radiation-sensitive material has a second sensitivity different from the first sensitivity. At least one mask is placed between at least one radiation source and the first and second radiation-sensitive materials. The mask has a plurality of substantially radiation-transparent apertures. The first and second radiation-sensitive materials are then exposed to a plurality of radiation beams through the radiation-transparent apertures in the mask to form a first construct in the first radiation-sensitive material and a second construct in the second radiation-sensitive material. The first construct and the second construct cooperate to form the radiation-cured structure.
Public/Granted literature
- US20150055114A1 LAYERED RADIATION-SENSITIVE MATERIALS WITH VARYING SENSITIVITY Public/Granted day:2015-02-26
Information query
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