Invention Grant
US09256221B2 Information processing apparatus, processing system, processing method, and program 有权
信息处理装置,处理系统,处理方法和程序

Information processing apparatus, processing system, processing method, and program
Abstract:
An information processing apparatus for processing information on semiconductor treatment apparatus includes an abnormality information display device which displays information on an abnormality in semiconductor treatment apparatus, a countermeasure information receiving device which receives countermeasure information on countermeasure, a countermeasure information storing device which stores the countermeasure information matched with abnormality identification information, an output device which outputs the countermeasure and abnormality identification information via communication device to outside, a countermeasure item display device which displays countermeasure item candidates, a countermeasure item storing device which stores countermeasure item selected from the candidates matched with the abnormality identification information, a countermeasure item transmitting device which transmits the countermeasure item and abnormality identification information via the communication device to outside, a countermeasure item statistic receiving device which receives statistic regarding the countermeasure item corresponding to the abnormality identification information from outside, and a countermeasure item statistic display device which displays the statistic.
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