Invention Grant
- Patent Title: Information processing apparatus, processing system, processing method, and program
- Patent Title (中): 信息处理装置,处理系统,处理方法和程序
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Application No.: US14040783Application Date: 2013-09-30
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Publication No.: US09256221B2Publication Date: 2016-02-09
- Inventor: Shinichiro Araki , Katsuhiko Matsuda , Kiminori Okada , Taichi Ito , Susumu Nakajima , Nobuhiro Horiuchi
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Minato-ku
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-072935 20110329
- Main IPC: G01N37/00
- IPC: G01N37/00 ; G05B19/418

Abstract:
An information processing apparatus for processing information on semiconductor treatment apparatus includes an abnormality information display device which displays information on an abnormality in semiconductor treatment apparatus, a countermeasure information receiving device which receives countermeasure information on countermeasure, a countermeasure information storing device which stores the countermeasure information matched with abnormality identification information, an output device which outputs the countermeasure and abnormality identification information via communication device to outside, a countermeasure item display device which displays countermeasure item candidates, a countermeasure item storing device which stores countermeasure item selected from the candidates matched with the abnormality identification information, a countermeasure item transmitting device which transmits the countermeasure item and abnormality identification information via the communication device to outside, a countermeasure item statistic receiving device which receives statistic regarding the countermeasure item corresponding to the abnormality identification information from outside, and a countermeasure item statistic display device which displays the statistic.
Public/Granted literature
- US20140032151A1 INFORMATION PROCESSING APPARATUS, PROCESSING SYSTEM, PROCESSING METHOD, AND PROGRAM Public/Granted day:2014-01-30
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