Invention Grant
US09256228B2 Mass flow controller with onboard diagnostics, prognostics, and data logging
有权
具有板载诊断,预测和数据记录的质量流量控制器
- Patent Title: Mass flow controller with onboard diagnostics, prognostics, and data logging
- Patent Title (中): 具有板载诊断,预测和数据记录的质量流量控制器
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Application No.: US13354631Application Date: 2012-01-20
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Publication No.: US09256228B2Publication Date: 2016-02-09
- Inventor: Alexei V. Smirnov , Patrick Albright , Cy Jordan , Arun Nagarajan , Michael J. Zolock , Ryan Johnson , Alexander Fernandez
- Applicant: Alexei V. Smirnov , Patrick Albright , Cy Jordan , Arun Nagarajan , Michael J. Zolock , Ryan Johnson , Alexander Fernandez
- Applicant Address: JP Tokyo
- Assignee: Hitachi Metals, Ltd.
- Current Assignee: Hitachi Metals, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Neugeboren O'Dowd PC
- Main IPC: G06F11/34
- IPC: G06F11/34 ; G05D7/06

Abstract:
A mass flow controller and method for operating the same is disclosed. The mass flow controller includes a mass flow control system to control the mass flow rate of a fluid, and a data logging component that obtains snapshots of condition-specific-data for each of a plurality of reoccurring condition types, and reduces each snapshot of condition-specific-data to functional parameter values that characterize each snapshot of condition-specific-data, and the data logging component generates statistical values that are stored in a short term data store that characterize multiple functional parameter values that are obtained during each separate occurrence of a specific condition type. A diagnostics component diagnoses failures using current functional parameter values and the statistical values stored in the short-term memory, and a prognostics component predicts failures based upon a collection of data sets that are stored in the long-term memory.
Public/Granted literature
- US20120186655A1 MASS FLOW CONTROLLER WITH ONBOARD DIAGNOSTICS, PROGNOSTICS, AND DATA LOGGING Public/Granted day:2012-07-26
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