Invention Grant
- Patent Title: Device manufacturing apparatus and device manufacturing method
- Patent Title (中): 装置制造装置及装置制造方法
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Application No.: US12876038Application Date: 2010-09-03
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Publication No.: US09256231B2Publication Date: 2016-02-09
- Inventor: Tomohiko Yoshida
- Applicant: Tomohiko Yoshida
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA, Inc., IP Division
- Priority: JP2009-209810 20090910
- Main IPC: G05D23/00
- IPC: G05D23/00 ; G05D23/19 ; H01L21/67
Abstract:
An apparatus for manufacturing a device comprises a temperature regulator configured to regulate a temperature of a component associated with manufacture of the device, a controller configured to control the temperature regulator, and a console configured to send command information to the controller upon receiving an input regarding an operation of the temperature regulator, the command information including a command for causing the temperature regulator to operate in an electric power saving mode, and a parameter which specifies a detail of the electric power saving mode.
Public/Granted literature
- US20110059621A1 DEVICE MANUFACTURING APPARATUS AND DEVICE MANUFACTURING METHOD Public/Granted day:2011-03-10
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