Invention Grant
- Patent Title: Low-G MEMS acceleration switch
- Patent Title (中): 低G MEMS加速开关
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Application No.: US14300109Application Date: 2014-06-09
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Publication No.: US09257247B2Publication Date: 2016-02-09
- Inventor: Tom Kwa
- Applicant: Meggitt (Orange County), Inc.
- Applicant Address: US CA Irvine
- Assignee: Meggitt (Orange County), Inc.
- Current Assignee: Meggitt (Orange County), Inc.
- Current Assignee Address: US CA Irvine
- Agency: Dickstein Shapiro LLP
- Main IPC: H01H50/10
- IPC: H01H50/10 ; H01H35/14 ; H01H59/00

Abstract:
A motion-sensitive low-G MEMS acceleration switch, which is a MEMS switch that closes at low-g acceleration (e.g., sensitive to no more than 10 Gs), is proposed. Specifically, the low-G MEMS acceleration switch has a base, a sensor wafer with one or more proofmasses, an open circuit that includes two fixed electrodes, and a contact plate. During acceleration, one or more of the proofmasses move towards the base and connects the two fixed electrodes together, resulting in a closing of the circuit that detects the acceleration. Sensitivity to low-G acceleration is achieved by proper dimensioning of the proofmasses and one or more springs used to support the proofmasses in the switch.
Public/Granted literature
- US20140291128A1 LOW-G MEMS ACCELERATION SWITCH Public/Granted day:2014-10-02
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