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US09257258B2 Method of making transmission electron microscope micro-grid 有权
制造透射电子显微镜微格栅的方法

Method of making transmission electron microscope micro-grid
Abstract:
A method of making a transmission electron microscope micro-grid includes following steps. A carbon nanotube layer is provided, and the carbon nanotube layer includes a first surface and a second surface opposite to each other. A first metal layer is electroplated on the first surface and a second metal layer is electroplated on the second surface. A number of first through holes are formed by etching the first metal layer, and a number of second through holes are formed by etching the second metal layer, wherein the carbon nanotube layer is exposed through the number of first through holes and the number of second through holes.
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