Invention Grant
- Patent Title: Method of making transmission electron microscope micro-grid
- Patent Title (中): 制造透射电子显微镜微格栅的方法
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Application No.: US14738950Application Date: 2015-06-15
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Publication No.: US09257258B2Publication Date: 2016-02-09
- Inventor: Yang Wei , Shou-Shan Fan
- Applicant: Tsinghua University , HON HAI PRECISION INDUSTRY CO., LTD.
- Applicant Address: CN Beijing TW New Taipei
- Assignee: Tsinghua University,HON HAI PRECISION INDUSTRY CO., LTD.
- Current Assignee: Tsinghua University,HON HAI PRECISION INDUSTRY CO., LTD.
- Current Assignee Address: CN Beijing TW New Taipei
- Agency: Novak Druce Connolly Bove + Quigg LLP
- Priority: CN201410269131 20140617
- Main IPC: H01B13/00
- IPC: H01B13/00 ; H01J37/20 ; H01J37/26 ; C25D7/00 ; C25D5/48 ; B82Y30/00

Abstract:
A method of making a transmission electron microscope micro-grid includes following steps. A carbon nanotube layer is provided, and the carbon nanotube layer includes a first surface and a second surface opposite to each other. A first metal layer is electroplated on the first surface and a second metal layer is electroplated on the second surface. A number of first through holes are formed by etching the first metal layer, and a number of second through holes are formed by etching the second metal layer, wherein the carbon nanotube layer is exposed through the number of first through holes and the number of second through holes.
Public/Granted literature
- US20150364293A1 METHOD OF MAKING TRANSMISSION ELECTRON MICROSCOPE MICRO-GRID Public/Granted day:2015-12-17
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