Invention Grant
US09257312B2 Metal oxide thin film substrate, method of fabricating the same, photovoltaic cell and OLED including the same
有权
金属氧化物薄膜基板，其制造方法，光伏电池和包括其的OLED
- Patent Title: Metal oxide thin film substrate, method of fabricating the same, photovoltaic cell and OLED including the same
- Patent Title (中): 金属氧化物薄膜基板，其制造方法，光伏电池和包括其的OLED
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Application No.: US13960994Application Date: 2013-08-07
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Publication No.: US09257312B2Publication Date: 2016-02-09
- Inventor: YoungZo Yoo , Seo Hyun Kim , June Hyoung Park , Il Hee Baek , Gun Sang Yoon , Hyunhee Lee , Eun Ho Choi
- Applicant: Samsung Corning Precision Materials Co., Ltd.
- Applicant Address: KR
- Assignee: Corning Precision Materials Co., Ltd.
- Current Assignee: Corning Precision Materials Co., Ltd.
- Current Assignee Address: KR
- Agency: Lerner, David, Littenberg, Krumholz & Mentlik, LLP
- Priority: KR10-2012-0088536 20120813
- Main IPC: H01L33/42
- IPC: H01L33/42 ; H01L21/64 ; H01L33/40 ; H01L31/0224 ; H01L51/52 ; H01L51/44 ; C03C17/245 ; G02B5/02 ; H01L31/18 ; H01L31/0236
Abstract:
A metal oxide thin film substrate which can increase light trapping efficiency and light extraction efficiency, a method of fabricating the same and a photovoltaic cell and organic light-emitting device (OLED) including the same. The metal oxide thin film substrate includes a base substrate, and a metal oxide thin film formed on the base substrate. The metal oxide thin film has voids which are formed inside the metal oxide thin film to scatter light.
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