Invention Grant
- Patent Title: Glass-ceramic-based semiconductor-on-insulator structures and method for making the same
- Patent Title (中): 玻璃陶瓷绝缘体上半导体结构及其制造方法
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Application No.: US12324576Application Date: 2008-11-26
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Publication No.: US09257328B2Publication Date: 2016-02-09
- Inventor: Christopher Paul Daigler , Kishor Purushottam Gadkaree , Joseph Frank Mach , Steven Alvin Tietje
- Applicant: Christopher Paul Daigler , Kishor Purushottam Gadkaree , Joseph Frank Mach , Steven Alvin Tietje
- Applicant Address: US NY Corning
- Assignee: Corning Incorporated
- Current Assignee: Corning Incorporated
- Current Assignee Address: US NY Corning
- Agent Ryan T. Hardee
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/762 ; H01L29/786

Abstract:
Methods and apparatus for forming a semiconductor on glass-ceramic structure provide for: subjecting an implantation surface of a donor semiconductor wafer to an ion implantation process to create an exfoliation layer of the donor semiconductor wafer; bonding the implantation surface of the exfoliation layer to a precursor glass substrate using electrolysis; separating the exfoliation layer from the donor semiconductor wafer to thereby form an intermediate semiconductor on precursor glass structure; sandwiching the intermediate semiconductor on precursor glass structure between first and second support structures; applying pressure to one or both of the first and second support structures; and subjecting the intermediate semiconductor on precursor glass structure to heat-treatment step to crystallize the precursor glass resulting in the formation of a semiconductor on glass-ceramic structure.
Public/Granted literature
- US20100127343A1 Glass-Ceramic-Based Semiconductor-On-Insulator Structures and Method For Making The Same Public/Granted day:2010-05-27
Information query
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