Invention Grant
- Patent Title: Merged tapered finFET
- Patent Title (中): 合并锥形finFET
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Application No.: US13941813Application Date: 2013-07-15
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Publication No.: US09257427B2Publication Date: 2016-02-09
- Inventor: Brent A. Anderson , Edward J. Nowak
- Applicant: International Business Machines Corporation
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Gibb & Riley, LLC
- Agent Michael J. LeStrange, Esq.
- Main IPC: H01L29/94
- IPC: H01L29/94 ; H01L27/092 ; H01L27/12 ; H01L29/66 ; H01L29/78 ; H01L21/84 ; H01L21/8238

Abstract:
According to a structure herein, parallel fins comprise channel regions and source and drain regions. Parallel gate conductors are over and intersecting the channel regions of the fins. Electrical insulator material surrounds sides of the gate conductors. Each of the fins has a main fin body and wider regions extending from the main fin body between the electrical insulator material surrounding the sides of the gate conductors. The wider regions comprise a first wider region extending a first width from the main fin body and a second wider region extending a second width from the main fin body. The material of the second wider region is continuous between adjacent fins.
Public/Granted literature
- US20150014774A1 MERGED TAPERED FINFET Public/Granted day:2015-01-15
Information query
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