Invention Grant
US09257500B2 Vertical gallium nitride power device with breakdown voltage control 有权
具有击穿电压控制的垂直氮化镓功率器件

Vertical gallium nitride power device with breakdown voltage control
Abstract:
A method for fabricating a vertical GaN power device includes providing a first GaN material having a first conductivity type and forming a second GaN material having a second conductivity type and coupled to the first GaN material to create a junction. The method further includes implanting ions through the second GaN material and into a first portion of the first GaN material to increase a doping concentration of the first conductivity type. The first portion of the junction is characterized by a reduced breakdown voltage relative to a breakdown voltage of a second portion of the junction.
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