Invention Grant
US09257500B2 Vertical gallium nitride power device with breakdown voltage control
有权
具有击穿电压控制的垂直氮化镓功率器件
- Patent Title: Vertical gallium nitride power device with breakdown voltage control
- Patent Title (中): 具有击穿电压控制的垂直氮化镓功率器件
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Application No.: US14517564Application Date: 2014-10-17
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Publication No.: US09257500B2Publication Date: 2016-02-09
- Inventor: Donald R. Disney
- Applicant: Avogy, Inc.
- Applicant Address: US CA San Jose
- Assignee: Avogy, Inc.
- Current Assignee: Avogy, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L21/265
- IPC: H01L21/265 ; H01L29/06 ; H01L29/66 ; H01L29/32 ; H01L29/36 ; H01L29/808 ; H01L29/861 ; H01L29/872 ; H01L29/20 ; H01L29/207

Abstract:
A method for fabricating a vertical GaN power device includes providing a first GaN material having a first conductivity type and forming a second GaN material having a second conductivity type and coupled to the first GaN material to create a junction. The method further includes implanting ions through the second GaN material and into a first portion of the first GaN material to increase a doping concentration of the first conductivity type. The first portion of the junction is characterized by a reduced breakdown voltage relative to a breakdown voltage of a second portion of the junction.
Public/Granted literature
- US20150104912A1 VERTICAL GALLIUM NITRIDE POWER DEVICE WITH BREAKDOWN VOLTAGE CONTROL Public/Granted day:2015-04-16
Information query
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