Invention Grant
- Patent Title: Method for producing an optoelectronic semiconductor chip, and optoelectronic semiconductor chip
- Patent Title (中): 制造光电半导体芯片的方法和光电子半导体芯片
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Application No.: US13704600Application Date: 2011-05-26
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Publication No.: US09257612B2Publication Date: 2016-02-09
- Inventor: Lutz Höppel , Norwin Von Malm
- Applicant: Lutz Höppel , Norwin Von Malm
- Applicant Address: DE Regensburg
- Assignee: OSRAM OPTO SEMICONDUCTORS GMBH
- Current Assignee: OSRAM OPTO SEMICONDUCTORS GMBH
- Current Assignee Address: DE Regensburg
- Agency: McDermott Will & Emery LLP
- Priority: DE102010024079 20100617
- International Application: PCT/EP2011/058653 WO 20110526
- International Announcement: WO2011/157523 WO 20111222
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L33/46 ; H01L33/38 ; H01L31/0232 ; H01L31/0224 ; H01L31/18 ; H01L33/00 ; H01L33/20

Abstract:
A method for producing an optoelectronic semiconductor chip is specified, comprising the following steps: providing an n-conducting layer (2), arranging a p-conducting layer (4) on the n-conducting layer (2), arranging a metal layer sequence (5) on the p-conducting layer (4), arranging a mask (6) at that side of the metal layer sequence (5) which is remote from the p-conducting layer (4), in places removing the metal layer sequence (5) and uncovering the p-conducting layer (4) using the mask (6), and in places neutralizing or removing the uncovered regions (4a) of the p-conducting layer (4) as far as the n-conducting layer (2) using the mask (6), wherein the metal layer sequence (5) comprises at least one mirror layer (51) and a barrier layer (52), and the mirror layer (51) of the metal layer sequence (5) faces the p-conducting layer (4).
Public/Granted literature
- US20130140598A1 METHOD FOR PRODUCING AN OPTOELECTRONIC SEMICONDUCTOR CHIP, AND OPTOELECTRONIC SEMICONDUCTOR CHIP Public/Granted day:2013-06-06
Information query
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