Invention Grant
- Patent Title: Physical quantity sensor and process for production thereof
- Patent Title (中): 物理量传感器及其生产方法
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Application No.: US13704413Application Date: 2011-06-22
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Publication No.: US09257632B2Publication Date: 2016-02-09
- Inventor: Yonggang Jiang , Kohei Higuchi , Hiroyuki Hamada , Kazusuke Maenaka
- Applicant: Yonggang Jiang , Kohei Higuchi , Hiroyuki Hamada , Kazusuke Maenaka
- Applicant Address: JP Kawaguchi-Shi, Saitama
- Assignee: JAPAN SCIENCE AND TECHNOLOGY AGENCY
- Current Assignee: JAPAN SCIENCE AND TECHNOLOGY AGENCY
- Current Assignee Address: JP Kawaguchi-Shi, Saitama
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer; Stanley N. Protigal
- Priority: JP2010-141923 20100622
- International Application: PCT/JP2011/064308 WO 20110622
- International Announcement: WO2011/162305 WO 20111229
- Main IPC: H01L41/04
- IPC: H01L41/04 ; H01L41/113 ; H01L41/047 ; H01L41/22 ; H01L41/332 ; G01L1/18 ; A61B5/024 ; A61B5/08 ; H01L41/193 ; A61B5/00

Abstract:
A physical quantity sensor (100), which can detect multiple physical quantities simultaneously has flexibility or bendability over the entire body thereof. The sensor (100) has a first electrode layer (2) formed on a substrate (1) and first and second piezoelectric elements (3a, 3b) arranged in parallel on the electrode layer (2). Two additional electrode layers (4a, 4b) are formed on the piezoelectric elements (3a, 3b). The substrate (1), the electrode layer (2), first piezoelectric element (3a), one of the additional electrode layers (4a) and protective layers (5a, 5b, 5c, 5d, 5e) constitute a first physical quantity detection unit (6), and the substrate (1), the first electrode layer (2), the second piezoelectric element (3b) and the other additional electrode layer (4b) (a fourth electrode layer) constitute a second physical quantity detection unit (7).
Public/Granted literature
- US20130088124A1 PHYSICAL QUANTITY SENSOR AND PROCESS FOR PRODUCTION THEREOF Public/Granted day:2013-04-11
Information query
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