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US09257632B2 Physical quantity sensor and process for production thereof 有权
物理量传感器及其生产方法

Physical quantity sensor and process for production thereof
Abstract:
A physical quantity sensor (100), which can detect multiple physical quantities simultaneously has flexibility or bendability over the entire body thereof. The sensor (100) has a first electrode layer (2) formed on a substrate (1) and first and second piezoelectric elements (3a, 3b) arranged in parallel on the electrode layer (2). Two additional electrode layers (4a, 4b) are formed on the piezoelectric elements (3a, 3b). The substrate (1), the electrode layer (2), first piezoelectric element (3a), one of the additional electrode layers (4a) and protective layers (5a, 5b, 5c, 5d, 5e) constitute a first physical quantity detection unit (6), and the substrate (1), the first electrode layer (2), the second piezoelectric element (3b) and the other additional electrode layer (4b) (a fourth electrode layer) constitute a second physical quantity detection unit (7).
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