Invention Grant
- Patent Title: Method of manufacturing organic layer on a substrate while fixed to electrostatic chuck and charging carrier using contactless power supply module
- Patent Title (中): 在使用非接触电源模块固定到静电卡盘和充电载体上的基板上制造有机层的方法
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Application No.: US13791899Application Date: 2013-03-08
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Publication No.: US09257649B2Publication Date: 2016-02-09
- Inventor: Kyu-Seob Han
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Christie, Parker & Hale, LLP
- Priority: KR10-2012-0075142 20120710
- Main IPC: H01L51/56
- IPC: H01L51/56 ; H01L21/677 ; H01L51/00 ; H01L51/52 ; C23C14/04 ; C23C14/56
Abstract:
An organic layer deposition apparatus, a method of manufacturing an organic light-emitting display device by using the same, and an organic light-emitting display device manufactured using the method, and in particular, an organic layer deposition apparatus that is suitable for use in the mass production of a large substrate and enables high-definition patterning, a method of manufacturing an organic light-emitting display device by using the same, and an organic light-emitting display device manufactured using the method.
Public/Granted literature
Information query
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