Invention Grant
US09257957B2 Impedance matching system and operating method thereof 有权
阻抗匹配系统及其操作方法

Impedance matching system and operating method thereof
Abstract:
An impedance matching system is provided. The impedance matching system includes an impedance matching apparatus and an impedance analysis apparatus. The impedance matching apparatus varies a capacitance value of a capacitor according to an applied voltage value, and matches an impedance according to the varied capacitance value. The impedance analysis apparatus supplies a voltage for varying the capacitance value to an impedance matching circuit, and determines an impedance value, changed according to the voltage value, to analyze characteristic of a capacitor included in the impedance matching apparatus.
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