Invention Grant
- Patent Title: Methods and apparatus for treating fluorinated greenhouse gases in gas streams
- Patent Title (中): 在气流中处理氟化温室气体的方法和装置
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Application No.: US14161470Application Date: 2014-01-22
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Publication No.: US09259683B2Publication Date: 2016-02-16
- Inventor: Leslie Swann
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: B01D53/68
- IPC: B01D53/68 ; B01D53/70 ; B01D53/74
Abstract:
A method for removing fluorinated greenhouse gas from a gas stream comprises reacting at least one fluorinated greenhouse gas in a gas stream with at least one of a silane-based and a borane-based compound to provide an abated gas stream. An apparatus for removing fluorinated greenhouse gases from a gas stream comprises a fluorinated gas decomposer unit configured to decompose fluorinated greenhouse gases in a gas stream. The apparatus further comprises a silane-based or a borane-based compound introduction unit configured to introduce at least one of a silane-based and a borane-based compound into the fluorinated gas decomposer unit.
Public/Granted literature
- US20150202566A1 METHODS AND APPARATUS FOR TREATING FLUORINATED GREENHOUSE GASES IN GAS STREAMS Public/Granted day:2015-07-23
Information query
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