Invention Grant
- Patent Title: Sealing apparatus for a process chamber
- Patent Title (中): 处理室密封装置
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Application No.: US13800750Application Date: 2013-03-13
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Publication No.: US09261193B2Publication Date: 2016-02-16
- Inventor: Joseph Yudovsky
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: F16J15/00
- IPC: F16J15/00 ; F16J15/02 ; F16J15/10 ; H01L21/67
Abstract:
A sealing apparatus is provided herein. In some embodiments, the sealing apparatus includes an annular body including a first portion having a circular cross-section and a second portion extending radially outward from the first portion, wherein the second portion has a rectangular cross-section. In some embodiments, a sealing apparatus includes a body configured to be retained in a recess of a first surface; an arm extending from the body away from the first surface and configured to provide a force when deflected towards the body by a second surface to form a seal between the first surface and the second surface.
Public/Granted literature
- US20130192756A1 SEALING APPARATUS FOR A PROCESS CHAMBER Public/Granted day:2013-08-01
Information query
