Invention Grant
- Patent Title: Method for manufacturing microstructure
- Patent Title (中): 微结构制造方法
-
Application No.: US14473837Application Date: 2014-08-29
-
Publication No.: US09263162B2Publication Date: 2016-02-16
- Inventor: Takayuki Teshima
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A. Inc., IP Division
- Priority: JP2013-178957 20130830; JP2014-145917 20140716
- Main IPC: C23F1/00
- IPC: C23F1/00 ; G21K1/06 ; C23F1/12 ; C09K13/02 ; C09K13/08 ; C23F1/02 ; C23F1/18 ; C23F1/28 ; C23F1/44 ; C25D1/08

Abstract:
A method is provided for producing a microstructure. The method includes the first step of forming a supporting layer on a base substrate including a silicon substrate provided with recessed sections at a first surface thereof and a metal structure filling the recessed sections so as to come in contact with the metal structure at the first surface, the second step of forming a structure including the metal structure and the supporting layer by selectively etching the silicon substrate to expose at least the surface of the metal structure opposite the surface in contact with the supporting layer from the silicon substrate, and the third step of selectively etching the supporting layer of the metal structure.
Public/Granted literature
- US20150060405A1 METHOD FOR MANUFACTURING MICROSTRUCTURE Public/Granted day:2015-03-05
Information query