Invention Grant
- Patent Title: Semiconductor memory device and method for manufacturing the same
- Patent Title (中): 半导体存储器件及其制造方法
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Application No.: US14299174Application Date: 2014-06-09
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Publication No.: US09263319B2Publication Date: 2016-02-16
- Inventor: Ryota Fujitsuka , Fumiki Aiso , Motoki Fujii , Hiroshi Itokawa
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Minato-ku
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L21/764 ; H01L29/788 ; H01L27/115

Abstract:
According to one embodiment, a semiconductor memory device includes a plurality of stacked bodies and a spacer film provided on a side surface of the stacked bodies. Each of the plurality of stacked bodies includes a silicon electrode and a metal electrode stacked on the metal electrode. The plurality of stacked bodies are separated from each other by an air gap. The spacer film includes silicon oxide. A portion of the spacer film disposed on a side surface of the metal electrode is thicker than a portion of the spacer film disposed on a side surface of the silicon electrode.
Public/Granted literature
- US20150060986A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2015-03-05
Information query
IPC分类: