Invention Grant
US09263319B2 Semiconductor memory device and method for manufacturing the same 有权
半导体存储器件及其制造方法

Semiconductor memory device and method for manufacturing the same
Abstract:
According to one embodiment, a semiconductor memory device includes a plurality of stacked bodies and a spacer film provided on a side surface of the stacked bodies. Each of the plurality of stacked bodies includes a silicon electrode and a metal electrode stacked on the metal electrode. The plurality of stacked bodies are separated from each other by an air gap. The spacer film includes silicon oxide. A portion of the spacer film disposed on a side surface of the metal electrode is thicker than a portion of the spacer film disposed on a side surface of the silicon electrode.
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