Semiconductor device and method of manufacture

Invention Grant

US09263337B2 Semiconductor device and method of manufacture 有权

Title translation: 半导体装置及其制造方法

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Patent Title: Semiconductor device and method of manufacture
Patent Title (中): 半导体装置及其制造方法
Application No.: US13414898

Application Date: 2012-03-08
Publication No.: US09263337B2

Publication Date: 2016-02-16
Inventor: Chun-Li Chou , Shao-Yen Ku , Chi-Yun Tseng , Yu-Yen Hsu , Tsai-Pao Su , Hobin Chen , Sheng-Chi Shih
Applicant: Chun-Li Chou , Shao-Yen Ku , Chi-Yun Tseng , Yu-Yen Hsu , Tsai-Pao Su , Hobin Chen , Sheng-Chi Shih
Applicant Address: TW Hsin-Chu
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
Current Assignee Address: TW Hsin-Chu
Agency: Slater & Matsil, L.L.P.
Main IPC: H01L21/8238
IPC: H01L21/8238 ; H01L21/8234 ; H01L29/78 ; H01L29/66 ; H01L29/165 ; H01L21/02 ; H01L21/306 ; H01L21/67

Semiconductor device and method of manufacture

Abstract:

A system and method for etching a substrate is provided. An embodiment comprises utilizing an inert carrier gas in order to introduce a liquid etchant to a substrate. The inert carrier gas may prevent undesirable chemical reactions from taking place during the etching process, thereby helping to reduce the number of defects that occur to the substrate and other structures during the etching process.

Abstract(Chinese):

提供了蚀刻基板的系统和方法。一个实施方案包括使用惰性载气以将液体蚀刻剂引入基底。惰性载气可以防止在蚀刻过程期间发生不期望的化学反应，从而有助于减少在蚀刻过程期间对基底和其它结构发生的缺陷的数量。

Public/Granted literature

US20130109140A1 Semiconductor Device and Method of Manufacture Public/Granted day:2013-05-02

Information query

Espacenet

IPC分类:

H	电学
H01	基本电气元件
H01L	半导体器件；其他类目中不包括的电固体器件（使用半导体器件的测量入G01；一般电阻器入H01C；磁体、电感器、变压器入H01F；一般电容器入H01G；电解型器件入H01G9/00；电池组、蓄电池入H01M；波导管、谐振器或波导型线路入H01P；线路连接器、汇流器入H01R；受激发射器件入H01S；机电谐振器入H03H；扬声器、送话器、留声机拾音器或类似的声机电传感器入H04R；一般电光源入H05B；印刷电路、混合电路、电设备的外壳或结构零部件、电气元件的组件的制造入H05K；在具有特殊应用的电路中使用的半导体器件见应用相关的小类）
H01L21/00	专门适用于制造或处理半导体或固体器件或其部件的方法或设备
H01L21/70	.由在一共用基片内或其上形成的多个固态组件或集成电路组成的器件或其部件的制造或处理；集成电路器件或其特殊部件的制造（由预制电组件组成的组装件的制造入H05K3/00，H05K13/00）
H01L21/77	..在公共衬底中或上面形成的由许多固态元件或集成电路组成的器件的制造或处理（电可编程只读存储器或其多步骤的制造方法入H01L27/115）
H01L21/78	...把衬底连续地分成多个独立的器件（改变表面物理特性或者半导体形状的切割入H01L21/304）
H01L21/82	....制造器件，例如每一个由许多元件组成的集成电路
H01L21/822	.....衬底是采用硅工艺的半导体的（H01L21/8258优先）
H01L21/8232	......场效应工艺
H01L21/8234	.......MIS工艺
H01L21/8238	........互补场效应晶体管，例如CMOS