Invention Grant
US09263340B2 Methods for removing selected fins that are formed for finFET semiconductor devices
有权
用于去除为finFET半导体器件形成的所选翅片的方法
- Patent Title: Methods for removing selected fins that are formed for finFET semiconductor devices
- Patent Title (中): 用于去除为finFET半导体器件形成的所选翅片的方法
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Application No.: US14268415Application Date: 2014-05-02
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Publication No.: US09263340B2Publication Date: 2016-02-16
- Inventor: William J. Taylor, Jr. , Ruilong Xie
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L21/762 ; H01L21/308 ; H01L21/311 ; H01L21/306 ; H01L27/088 ; H01L29/06

Abstract:
One illustrative method disclosed herein includes, among other things, forming a plurality of trenches in a semiconductor substrate to thereby define a plurality of fins in the substrate, forming a layer of insulating material in the trenches, performing an etching process sequence to remove at least a portion of one of the plurality of fins and thereby define a fin cavity, wherein the etching process sequence includes performing a first anisotropic etching process and, after performing the first anisotropic etching process, performing a second isotropic etching process. In this embodiment, the method concludes with the step of forming additional insulating material in the fin cavity.
Public/Granted literature
- US20150318215A1 METHODS FOR REMOVING SELECTED FINS THAT ARE FORMED FOR FINFET SEMICONDUCTOR DEVICES Public/Granted day:2015-11-05
Information query
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