Invention Grant
- Patent Title: CMOS with dual raised source and drain for NMOS and PMOS
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Application No.: US14608370Application Date: 2015-01-29
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Publication No.: US09263465B2Publication Date: 2016-02-16
- Inventor: Kangguo Cheng , Bruce B. Doris , Balasubramanian S. Haran , Ali Khakifirooz
- Applicant: International Business Machines Corporation
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Cantor Colburn LLP
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/84 ; H01L27/092 ; H01L29/16 ; H01L29/161 ; H01L29/167 ; H01L21/02 ; H01L21/283 ; H01L21/306 ; H01L21/311 ; H01L21/3205 ; H01L29/06 ; H01L29/417 ; H01L29/45 ; H01L29/66 ; H01L21/033 ; H01L21/324 ; H01L21/8238

Abstract:
An apparatus and a method for creating a CMOS with a dual raised source and drain for NMOS and PMOS. The spacers on both stack gates are of equal thickness. In this method, a first insulating layer is formed on the surface. The first region is then masked while the other region has the first layer etched away and has an epitaxial source and drain grown on the region. A second layer is formed to all exposed surfaces. The second region is then masked while the first region is etched away. The epitaxial source and drain is formed on the first region. The second region can also be masked by adding a thin layer of undoped silicon and then oxidize it. Another way to mask the second region is to use a hard mask. Another way to form the second source and drain is to use amorphous material.
Public/Granted literature
- US20150137147A1 CMOS WITH DUAL RAISED SOURCE AND DRAIN FOR NMOS AND PMOS Public/Granted day:2015-05-21
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